Invention Grant
US07888709B2 Capacitive micromachined ultrasonic transducer and manufacturing method
有权
电容式微加工超声波换能器及其制造方法
- Patent Title: Capacitive micromachined ultrasonic transducer and manufacturing method
- Patent Title (中): 电容式微加工超声波换能器及其制造方法
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Application No.: US12420683Application Date: 2009-04-08
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Publication No.: US07888709B2Publication Date: 2011-02-15
- Inventor: David F. Lemmerhirt , Collin A. Rich
- Applicant: David F. Lemmerhirt , Collin A. Rich
- Applicant Address: US MI Ann Arbor
- Assignee: Sonetics Ultrasound, Inc.
- Current Assignee: Sonetics Ultrasound, Inc.
- Current Assignee Address: US MI Ann Arbor
- Agent Jeffrey Schox
- Main IPC: H01L29/84
- IPC: H01L29/84

Abstract:
The integrated circuit/transducer device of the preferred embodiment includes a substrate, a complementary-metal-oxide-semiconductor (CMOS) circuit that is fabricated on the substrate, and a capacitive micromachined ultrasonic transducer (cMUT) element that is also fabricated on the substrate. The CMOS circuit and cMUT element are fabricated during the same foundry process and are connected. The cMUT includes a lower electrode, an upper electrode, a membrane structure that support the upper electrode, and a cavity between the upper electrode and lower electrode.
Public/Granted literature
- US20090250729A1 CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND MANUFACTURING METHOD Public/Granted day:2009-10-08
Information query
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