Invention Grant
US07888728B2 Non-volatile semiconductor memory device and its manufacturing method
有权
非易失性半导体存储器件及其制造方法
- Patent Title: Non-volatile semiconductor memory device and its manufacturing method
- Patent Title (中): 非易失性半导体存储器件及其制造方法
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Application No.: US12140946Application Date: 2008-06-17
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Publication No.: US07888728B2Publication Date: 2011-02-15
- Inventor: Toshitake Yaegashi , Kazuhiro Shimizu , Seiichi Aritome
- Applicant: Toshitake Yaegashi , Kazuhiro Shimizu , Seiichi Aritome
- Applicant Address: JP Kawasaki-shi
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Kawasaki-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP9-184863 19970710
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
In a non-volatile semiconductor memory device and a method for manufacturing the device, each memory cell and its select Tr have the same gate insulating film as a Vcc Tr. Further, the gate electrodes of a Vpp Tr and Vcc Tr are realized by the use of a first polysilicon layer. A material such as salicide or a metal, which differs from second polysilicon (which forms a control gate layer), may be provided on the first polysilicon layer. With the above features, a non-volatile semiconductor memory device can be manufactured by reduced steps and be operated at high speed in a reliable manner.
Public/Granted literature
- US20080251834A1 NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE AND ITS MANUFACTURING METHOD Public/Granted day:2008-10-16
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