Invention Grant
- Patent Title: Power semiconductor device
- Patent Title (中): 功率半导体器件
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Application No.: US11747503Application Date: 2007-05-11
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Publication No.: US07888733B2Publication Date: 2011-02-15
- Inventor: Eisuke Suekawa
- Applicant: Eisuke Suekawa
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-267137 20060929
- Main IPC: H01L29/739
- IPC: H01L29/739

Abstract:
A power semiconductor having a first, second, third, and fourth semiconductor layer on top of each other, two trench gates parallel and adjacent to each other, each having a trench in the fourth semiconductor layer with the a trench bottom portion reaching into the third semiconductor layer, a gate insulation film lining the trench, and a gate electrode filling the trench being lined with the gate insulation film, two first semiconductor region regions provided contiguously bordering on one side of each of the two trench gates, located at the outer sides of each of the two adjacent trench gates, and located in the top side of the fourth semiconductor layer, a first main electrode on the fourth semiconductor layer, and a second main electrode provided on a bottom of the first semiconductor layer.
Public/Granted literature
- US20080079069A1 POWER SEMICONDUCTOR DEVICE Public/Granted day:2008-04-03
Information query
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