Invention Grant
US07888745B2 Bipolar transistor with dual shallow trench isolation and low base resistance
有权
具有双浅沟槽隔离和低基极电阻的双极晶体管
- Patent Title: Bipolar transistor with dual shallow trench isolation and low base resistance
- Patent Title (中): 具有双浅沟槽隔离和低基极电阻的双极晶体管
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Application No.: US11425550Application Date: 2006-06-21
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Publication No.: US07888745B2Publication Date: 2011-02-15
- Inventor: Marwan H. Khater , Andreas D. Stricker , Bradley A. Orner , Mattias E. Dahlstrom
- Applicant: Marwan H. Khater , Andreas D. Stricker , Bradley A. Orner , Mattias E. Dahlstrom
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent H. Daniel Schnurmann
- Main IPC: H01L29/72
- IPC: H01L29/72

Abstract:
An improved bipolar transistor with dual shallow trench isolation for reducing the parasitic component of the base to collector capacitance Ccb and base resistance Rb is provided. The structure includes a semiconductor substrate having at least a pair of neighboring first shallow trench isolation (STI) regions disposed therein. The pair of neighboring first STI regions defines an active area in the substrate. The structure also includes a collector disposed in the in the active area of the semiconductor substrate, a base layer disposed atop a surface of the semiconductor substrate in the active area, and a raised extrinsic base disposed on the base layer. In accordance with the present, the raised extrinsic base has an opening to a portion of the base layer. An emitter is located in the opening and extending on a portion of the patterned raised extrinsic base; the emitter is spaced apart and isolated from the raised extrinsic base. Moreover, and in addition to the first STI region, a second shallow trench isolation (STI) region is present in the semiconductor substrate which extends inward from each pair of said first shallow trench isolation regions towards said collector. The second STI region has an inner sidewall surface that is sloped. In some embodiments, the base is completely monocrystalline.
Public/Granted literature
- US20070298578A1 BIPOLAR TRANSISTOR WITH DUAL SHALLOW TRENCH ISOLATION AND LOW BASE RESISTANCE Public/Granted day:2007-12-27
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