Invention Grant
US07888750B2 Multi-fin multi-gate field effect transistor with tailored drive current
有权
具有定制驱动电流的多鳍多栅极场效应晶体管
- Patent Title: Multi-fin multi-gate field effect transistor with tailored drive current
- Patent Title (中): 具有定制驱动电流的多鳍多栅极场效应晶体管
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Application No.: US12033325Application Date: 2008-02-19
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Publication No.: US07888750B2Publication Date: 2011-02-15
- Inventor: Brent A. Anderson , Edward J. Nowak
- Applicant: Brent A. Anderson , Edward J. Nowak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb I.P. law Firm, LLC
- Agent Richard M. Kotulak, Esq.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/10

Abstract:
Disclosed are embodiments of an improved multi-gated field effect transistor (MUGFET) structure and method of forming the MUGFET structure so that it exhibits a more tailored drive current. Specifically, the MUGFET incorporates multiple semiconductor fins in order to increase effective channel width of the device and, thereby, to increase the drive current of the device. Additionally, the MUGFET incorporates a gate structure having different sections with different physical dimensions relative to the semiconductor fins in order to more finely tune device drive current (i.e., to achieve a specific drive current). Optionally, the MUGFET also incorporates semiconductor fins with differing widths in order to minimize leakage current caused by increases in drive current.
Public/Granted literature
- US20090206374A1 MULTI-FIN MULTI-GATE FIELD EFFECT TRANSISTOR WITH TAILORED DRIVE CURRENT Public/Granted day:2009-08-20
Information query
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