Invention Grant
US07888776B2 Capacitor-based method for determining and characterizing scribe seal integrity and integrity loss
有权
用于确定和表征划痕密封完整性和完整性损失的基于电容器的方法
- Patent Title: Capacitor-based method for determining and characterizing scribe seal integrity and integrity loss
- Patent Title (中): 用于确定和表征划痕密封完整性和完整性损失的基于电容器的方法
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Application No.: US12165419Application Date: 2008-06-30
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Publication No.: US07888776B2Publication Date: 2011-02-15
- Inventor: Ennis T. Ogawa , Honglin Guo , Joe W. McPherson
- Applicant: Ennis T. Ogawa , Honglin Guo , Joe W. McPherson
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Warren L. Franz; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: H01L23/544
- IPC: H01L23/544
Abstract:
One embodiment of the present invention relates to a scribe seal integrity detector. In this embodiment a scribe seal integrity detector is formed in an integrated circuit chip die. The scribe seal integrity comprises a scribe seal structure that extends along at least a portion of the periphery of the integrated chip die and a detector test structure. The detector test structure and the scribe seal form an electrical system configured to be accessed for a monitoring of one or more electrical parameters to determine and characterize scribe seal integrity of the integrated circuit chip die. The results of the electric measurements are analyzed for statistically relevant reliability characterization. Other methods and circuits are also disclosed.
Public/Granted literature
- US20090321734A1 CAPACITOR-BASED METHOD FOR DETERMINING AND CHARACTERIZING SCRIBE SEAL INTEGRITY AND INTEGRITY LOSS Public/Granted day:2009-12-31
Information query
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