Invention Grant
US07889027B2 Film bulk acoustic resonator shaped as an ellipse with a part cut off 有权
薄膜体声共振器成形为椭圆形,部分切断

  • Patent Title: Film bulk acoustic resonator shaped as an ellipse with a part cut off
  • Patent Title (中): 薄膜体声共振器成形为椭圆形,部分切断
  • Application No.: US12066317
    Application Date: 2006-07-05
  • Publication No.: US07889027B2
    Publication Date: 2011-02-15
  • Inventor: Shuichi OkaTerukazu Ohno
  • Applicant: Shuichi OkaTerukazu Ohno
  • Applicant Address: JP Tokyo
  • Assignee: Sony Corporation
  • Current Assignee: Sony Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: K&L Gates LLP
  • Priority: JPP2005-261573 20050909
  • International Application: PCT/JP2006/313403 WO 20060705
  • International Announcement: WO2007/029409 WO 20070315
  • Main IPC: H03H9/13
  • IPC: H03H9/13 H03H9/17 H03H9/54
Film bulk acoustic resonator shaped as an ellipse with a part cut off
Abstract:
An object is to provide a film bulk acoustic resonator capable of improving resonant characteristics by reducing the generation of a standing wave to be caused by a transverse-mode acoustic wave to a minimum. In a film bulk acoustic resonator including a resonant portion A having a piezoelectric material layer 3 sandwiched between a first electrode 2 and a second electrode 4, the resonant portion A is configured to have a planar shape that is an ellipse having a part thereof cut off along a straight line L. The straight line L intersects at least one of a minor axis and a major axis of the ellipse, and preferably intersects both the minor axis and the major axis, and passes through the center of the ellipse.
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