Invention Grant
US07889027B2 Film bulk acoustic resonator shaped as an ellipse with a part cut off
有权
薄膜体声共振器成形为椭圆形,部分切断
- Patent Title: Film bulk acoustic resonator shaped as an ellipse with a part cut off
- Patent Title (中): 薄膜体声共振器成形为椭圆形,部分切断
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Application No.: US12066317Application Date: 2006-07-05
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Publication No.: US07889027B2Publication Date: 2011-02-15
- Inventor: Shuichi Oka , Terukazu Ohno
- Applicant: Shuichi Oka , Terukazu Ohno
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: K&L Gates LLP
- Priority: JPP2005-261573 20050909
- International Application: PCT/JP2006/313403 WO 20060705
- International Announcement: WO2007/029409 WO 20070315
- Main IPC: H03H9/13
- IPC: H03H9/13 ; H03H9/17 ; H03H9/54

Abstract:
An object is to provide a film bulk acoustic resonator capable of improving resonant characteristics by reducing the generation of a standing wave to be caused by a transverse-mode acoustic wave to a minimum. In a film bulk acoustic resonator including a resonant portion A having a piezoelectric material layer 3 sandwiched between a first electrode 2 and a second electrode 4, the resonant portion A is configured to have a planar shape that is an ellipse having a part thereof cut off along a straight line L. The straight line L intersects at least one of a minor axis and a major axis of the ellipse, and preferably intersects both the minor axis and the major axis, and passes through the center of the ellipse.
Public/Granted literature
- US20100156565A1 FILM BULK ACOUSTIC RESONATOR Public/Granted day:2010-06-24
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