Invention Grant
- Patent Title: Exposure apparatus and device fabrication method
- Patent Title (中): 曝光装置和装置制造方法
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Application No.: US12369581Application Date: 2009-02-11
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Publication No.: US07889319B2Publication Date: 2011-02-15
- Inventor: Naoto Hayashi , Shinichiro Hirai
- Applicant: Naoto Hayashi , Shinichiro Hirai
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., IP Division
- Priority: JP2008-035084 20080215
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03B27/54

Abstract:
The present invention provides an exposure apparatus including a measuring unit which includes an imaging optical system configured to guide light having propagated through a projection optical system to an image sensor, and is configured to measure the overall birefringence of the imaging optical system and the projection optical system, a calibration unit which is set on a side of an object plane of the projection optical system in order to measure a birefringence of the imaging optical system, and is configured to reflect the light from the measuring unit back to the measuring unit without using the projection optical system, and a calculation unit configured to isolate, from the result of measuring the overall birefringence, the birefringence of the imaging optical system measured by the measuring unit, thereby calculating the birefringence of the projection optical system.
Public/Granted literature
- US20090207400A1 EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD Public/Granted day:2009-08-20
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