Invention Grant
US07889416B1 Method of aligning a light beam in an optical scanning system employing an agile beam steering mirror
有权
在采用敏捷光束导向镜的光学扫描系统中对准光束的方法
- Patent Title: Method of aligning a light beam in an optical scanning system employing an agile beam steering mirror
- Patent Title (中): 在采用敏捷光束导向镜的光学扫描系统中对准光束的方法
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Application No.: US12428467Application Date: 2009-04-22
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Publication No.: US07889416B1Publication Date: 2011-02-15
- Inventor: Timothy D. Stowe
- Applicant: Timothy D. Stowe
- Applicant Address: US CA Palo Alto
- Assignee: Palo Alto Research Center Incorporated
- Current Assignee: Palo Alto Research Center Incorporated
- Current Assignee Address: US CA Palo Alto
- Agent Jonathan A. Small
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02F1/29 ; G02F1/03

Abstract:
Scan line position error resulting in banding, bow, skew, etc. is corrected by way of an agile beam steering mirror assembly in a ROS printing system and the like. The agile beam steering mirror system comprises a piezoelectric bending actuator fixedly mounted to a substrate at a proximate end thereof. A mirror structure is mounted at a free distal end of the bending actuator. Voltage applied to the bending actuator causes rotation of the mirror to thereby correct for positional errors of the scan line. Correction waveforms may be stored in control memory associated with the agile beam steering mirror assembly. A capacitive sensing circuit using a sensing electrode located beneath the free end of the bending actuator may be used in a feedback arrangement to determine and control mirror position.
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