Invention Grant
US07889549B2 Nonvolatile semiconductor memory and data programming/erasing method 有权
非易失性半导体存储器和数据编程/擦除方法

Nonvolatile semiconductor memory and data programming/erasing method
Abstract:
A nonvolatile semiconductor memory comprises: a semiconductor substrate; a first gate electrode formed on a surface of the semiconductor substrate through a first gate insulating film; a second gate electrode formed on the surface of the semiconductor substrate through a second gate insulating film and being adjacent to the first gate electrode through an insulating film; a charge trapping film formed at least in a trap region surrounded by the semiconductor substrate, the first gate electrode and the second gate electrode; and a tunnel insulating film formed between the charge trapping film and the second gate electrode. In one of programming and erasing, electrons are injected into the charge trapping film from the second gate electrode through the tunnel insulating film by Fowler-Nordheim tunneling.
Information query
Patent Agency Ranking
0/0