Invention Grant
- Patent Title: Micromachined optical pressure sensor
- Patent Title (中): 微加工光学压力传感器
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Application No.: US12075922Application Date: 2008-03-14
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Publication No.: US07889955B2Publication Date: 2011-02-15
- Inventor: Anthony D. Kurtz , Boaz Kochman , Joseph Van DeWeert
- Applicant: Anthony D. Kurtz , Boaz Kochman , Joseph Van DeWeert
- Applicant Address: US NJ Leonia
- Assignee: Kulite Semiconductor Products, Inc.
- Current Assignee: Kulite Semiconductor Products, Inc.
- Current Assignee Address: US NJ Leonia
- Agency: Troutman Sanders LLP
- Agent James E. Schutz, Esq.
- Main IPC: G02B6/00
- IPC: G02B6/00
Abstract:
A pressure sensor including: a deflectable diaphragm including a substantially central boss and channel; and, an optical waveguide having first and second arms, wherein the first arm is substantially aligned with an edge of the boss and the second arm is substantially aligned with an edge of the channel.
Public/Granted literature
- US20080175529A1 Micromachined optical pressure sensor Public/Granted day:2008-07-24
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