Invention Grant
- Patent Title: Automatic landing method and apparatus for scanning probe microscope using the same
- Patent Title (中): 扫描探针显微镜的自动着陆方法及装置
-
Application No.: US12225404Application Date: 2008-05-29
-
Publication No.: US07891016B2Publication Date: 2011-02-15
- Inventor: Haiwon Lee , Chung Choo Chung , Cheolsu Han
- Applicant: Haiwon Lee , Chung Choo Chung , Cheolsu Han
- Applicant Address: KR Seoul
- Assignee: IUCF HYU (Industry-University Cooperation Foundation Hanyang University
- Current Assignee: IUCF HYU (Industry-University Cooperation Foundation Hanyang University
- Current Assignee Address: KR Seoul
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2007-0052042 20070529; KR10-2008-0032371 20080407
- International Application: PCT/KR2008/003016 WO 20080529
- International Announcement: WO2008/147120 WO 20081204
- Main IPC: G01Q10/06
- IPC: G01Q10/06 ; G01Q20/04 ; G01B11/08 ; G01B9/02

Abstract:
Disclosed herein are an automatic landing method for a scanning probe microscope and an automatic landing apparatus using the same. The method comprises irradiating light to a cantilever using a light source; collecting interference fringes generated by the light being diffracted from the edge of the cantilever and then being incident to a surface of the sample; driving the tip in the sample direction until the pattern of the interference fringes reaches a predetermined pattern region (first driving); and driving the tip in the sample direction after the interference fringe pattern reached the predetermined pattern region (second driving). The method in accordance with the present invention is very effective particularly for samples having a large surface area, because it enables automatic landing of a tip according to recognition and selection of an optimal time point for individual landing steps, irrespective of adverse changes in landing conditions, such as surface irregularities of samples. Further, the present invention enables a very inexpensive and effective application of a scanning probe microscope (SPM), because it is possible to achieve rapid and reliable driving of a tip to within an approximate distance of a sample.
Public/Granted literature
- US20090293160A1 Automatic Landing Method and Apparatus for Scanning Probe Microscope Using the Same Public/Granted day:2009-11-26
Information query