Invention Grant
US07896051B2 Semiconductor die bonding apparatus having multiple bonding head units
失效
具有多个接合头单元的半导体管芯接合装置
- Patent Title: Semiconductor die bonding apparatus having multiple bonding head units
- Patent Title (中): 具有多个接合头单元的半导体管芯接合装置
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Application No.: US11954368Application Date: 2007-12-12
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Publication No.: US07896051B2Publication Date: 2011-03-01
- Inventor: Byung Chul Kang , Kwang Duck Koh , Jum Dong Lee , Hwa Seob Lee , Jae Moo Shin
- Applicant: Byung Chul Kang , Kwang Duck Koh , Jum Dong Lee , Hwa Seob Lee , Jae Moo Shin
- Applicant Address: KR Kyoungki-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Kyoungki-do
- Agency: Ladas & Parry LLP
- Priority: KR10-2007-0114270 20071109
- Main IPC: B32B37/12
- IPC: B32B37/12 ; B32B37/00

Abstract:
A die bonding apparatus is presented which is capable of realizing different semiconductor packages, for example, a face up package and a face down package in a single die bonding apparatus. The die bonding apparatus includes a substrate transportation unit for transporting a substrate. A first bonding head unit is included which has a first bonding head for bonding a semiconductor chip disposed in a mount table adjacent to the substrate transportation unit over the substrate. A die transportation unit is included for transporting the semiconductor chip disposed in a mount table to a mount stage disposed at a lower portion of the substrate. A second bonding head unit is included in which the mount stage and a second bonding head disposed at an upper portion of the substrate corresponding to the mount stage and bonding the semiconductor chip disposed in the mount stage to the lower portion of the substrate.
Public/Granted literature
- US20090120589A1 SEMICONDUCTOR DIE BONDING APPARATUS HAVING MULTIPLE BONDING HEAD UNITS Public/Granted day:2009-05-14
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