Invention Grant
- Patent Title: Bonding apparatus and bonding method
- Patent Title (中): 接合装置和接合方法
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Application No.: US11603039Application Date: 2006-11-22
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Publication No.: US07896052B2Publication Date: 2011-03-01
- Inventor: Shinjiro Watanabe
- Applicant: Shinjiro Watanabe
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JP2005-340891 20051125
- Main IPC: B32B37/00
- IPC: B32B37/00

Abstract:
The present invention is a bonding apparatus which bonds a first object to be bonded and a second object to be bonded by bringing a bonding member into contact with an upper surface of the second object to be bonded placed on an upper surface of the first object to be bonded and ultrasonically vibrating the second object to be bonded by the bonding member, and the bonding member includes: a contact portion brought into contact with the second object to be bonded; and a holding portion holding the second object to bonded. With this structure, it is possible to prevent the object to bonded from sliding sideways to thereby properly bond the objects to be bonded to each other, even with a low pressing force.
Public/Granted literature
- US20070119535A1 Bonding apparatus and bonding method Public/Granted day:2007-05-31
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