Invention Grant
US07896563B2 Photo spinner apparatus and wafer carrier loading/unloading method using the same
失效
照相旋转器和晶圆载体的装载/卸载方法使用该装置
- Patent Title: Photo spinner apparatus and wafer carrier loading/unloading method using the same
- Patent Title (中): 照相旋转器和晶圆载体的装载/卸载方法使用该装置
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Application No.: US12318732Application Date: 2009-01-07
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Publication No.: US07896563B2Publication Date: 2011-03-01
- Inventor: Yong-Su Kim
- Applicant: Yong-Su Kim
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2008-0003290 20080111
- Main IPC: G03D5/00
- IPC: G03D5/00 ; B65H1/00

Abstract:
A photo spinner apparatus, including a spin coater for coating a plurality of wafers with photoresist, a bake device for hardening the photoresist coated by the spin coater, a developer for developing the photoresist hardened in the bake device, a transfer unit for transferring the plurality of wafers between the developer, the bake device, and the spin coater, and an indexer including a wafer carrier loader to vertically stack a plurality of wafer carriers into which the plurality of wafers transferred by the transfer unit are loaded.
Public/Granted literature
- US20090180849A1 Photo spinner apparatus and wafer carrier loading/unloading method using the same Public/Granted day:2009-07-16
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