Invention Grant
US07896563B2 Photo spinner apparatus and wafer carrier loading/unloading method using the same 失效
照相旋转器和晶圆载体的装载/卸载方法使用该装置

Photo spinner apparatus and wafer carrier loading/unloading method using the same
Abstract:
A photo spinner apparatus, including a spin coater for coating a plurality of wafers with photoresist, a bake device for hardening the photoresist coated by the spin coater, a developer for developing the photoresist hardened in the bake device, a transfer unit for transferring the plurality of wafers between the developer, the bake device, and the spin coater, and an indexer including a wafer carrier loader to vertically stack a plurality of wafer carriers into which the plurality of wafers transferred by the transfer unit are loaded.
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