Invention Grant
- Patent Title: Method for the production of a plurality of optoelectronic semiconductor chips and optoelectronic semiconductor chip
- Patent Title (中): 制造多个光电子半导体芯片和光电子半导体芯片的方法
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Application No.: US10566521Application Date: 2004-07-22
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Publication No.: US07896965B2Publication Date: 2011-03-01
- Inventor: Volker Härle
- Applicant: Volker Härle
- Applicant Address: DE Regensburg
- Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee Address: DE Regensburg
- Agency: Cohen Pontani Lieberman & Pavane LLP
- Priority: DE10335081 20030731
- International Application: PCT/DE2004/001594 WO 20040722
- International Announcement: WO2005/013316 WO 20050210
- Main IPC: C30B25/04
- IPC: C30B25/04

Abstract:
A method for the production of a plurality of optoelectronic semiconductor chips each having a plurality of structural elements with respectively at least one semiconductor layer. The method involves providing a chip composite base having a substrate and a growth surface. A non-closed mask material layer is grown onto the growth surface in such a way that the mask material layer has a plurality of statistically distributed windows having varying forms and/or opening areas, a mask material being chosen in such a way that a semiconductor material of the semiconductor layer that is to be grown in a later method step essentially cannot grow on said mask material or can grow in a substantially worse manner in comparison with the growth surface. Subsequently, semiconductor layers are deposited essentially simultaneously onto regions of the growth surface that lie within the windows. A further method step is singulation of the chip composite base with applied material to form semiconductor chips. An optoelectronic semiconductor component is produced according to the method.
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