Invention Grant
- Patent Title: Adhesive film bonding method
- Patent Title (中): 胶粘剂粘合法
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Application No.: US12081134Application Date: 2008-04-10
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Publication No.: US07897000B2Publication Date: 2011-03-01
- Inventor: Kiyotaka Kizaki , Hiroshi Nakamura
- Applicant: Kiyotaka Kizaki , Hiroshi Nakamura
- Applicant Address: JP Tokyo
- Assignee: Disco Corporation
- Current Assignee: Disco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2007-111817 20070420
- Main IPC: B44C1/165
- IPC: B44C1/165

Abstract:
A method of bonding an adhesive film for die bonding to the rear surface of a wafer having a plurality of devices on the front surface, comprising the steps of holding the front surface side of the wafer on the holding surface of a chuck table for holding the wafer; supplying the adhesive film onto the rear surface of the wafer held on the chuck table; and rolling a pressing-roller while pressing it against the adhesive film supplied onto the rear surface of the wafer to bond the adhesive film to the rear surface of the wafer, wherein the step of rolling the pressing-roller is carried out in such a positional relation that a straight line connecting the center of the wafer and a notch becomes parallel to the axis of the pressing-roller.
Public/Granted literature
- US20080257474A1 Adhesive film bonding method Public/Granted day:2008-10-23
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