Invention Grant
- Patent Title: Error diffusion-derived sub-resolutional grayscale reticle
- Patent Title (中): 误差扩散衍生的子解析灰度光栅
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Application No.: US12247130Application Date: 2008-10-07
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Publication No.: US07897302B2Publication Date: 2011-03-01
- Inventor: Bruce D. Ulrich , Yoshi Ono , Wei Gao
- Applicant: Bruce D. Ulrich , Yoshi Ono , Wei Gao
- Applicant Address: US WA Camas
- Assignee: Sharp Laboratories of America, Inc.
- Current Assignee: Sharp Laboratories of America, Inc.
- Current Assignee Address: US WA Camas
- Agency: Law Office of Gerald Maliszewski
- Agent Gerald Maliszewski
- Main IPC: G03F1/00
- IPC: G03F1/00 ; G06F17/50
Abstract:
A method is provided for forming an error diffusion-derived sub-resolutional grayscale reticle. The method forms at least one partial-light transmissive layer overlying a transparent substrate. At least one unit cell in formed in the transmissive layer. The unit cell is formed by selecting the number of reduced-transmission pixels in the unit cell, and forming a sub-pattern of reduced-transmission pixels in the unit cell. The unit cell is sub-resolutional at a first wavelength.
Public/Granted literature
- US20100040959A1 Error Diffusion-Derived Sub-Resolutional Grayscale Reticle Public/Granted day:2010-02-18
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