Invention Grant
- Patent Title: Method of fabricating a CMOS image sensor
- Patent Title (中): CMOS图像传感器的制造方法
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Application No.: US11948786Application Date: 2007-11-30
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Publication No.: US07897441B2Publication Date: 2011-03-01
- Inventor: Sang Gi Lee
- Applicant: Sang Gi Lee
- Applicant Address: KR Seoul
- Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Workman Nydegger
- Priority: KR10-2006-0137363 20061229
- Main IPC: H01L21/8232
- IPC: H01L21/8232

Abstract:
A method of fabricating a CMOS image sensor comprising forming an epitaxial layer on a semiconductor substrate, the epitaxial layer comprising a pixel and logic area, forming an STI layer in the epitaxial layer, forming a plurality of wells and a gate pattern having a spacer on the epitaxial layer, forming a plurality of source and drain regions in the epitaxial layer using ion implantation, forming a salicide blocking layer on the epitaxial layer and gate pattern in the pixel area, forming a plurality of silicide layers in the logic area by performing a silicidation process, sequentially forming a PMD liner nitride layer and a PSG layer on the salicide blocking layer in the pixel area and the epitaxial layer and the gate pattern in the logic area, and forming a plurality of contacts connecting the PSG layer to the source and drain regions.
Public/Granted literature
- US20080157144A1 CMOS IMAGE SENSOR AND FABRICATING METHOD THEREOF Public/Granted day:2008-07-03
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