Invention Grant
US07897458B2 Method of forming floating gate, non-volatile memory device using the same, and fabricating method thereof
有权
形成浮栅的方法,使用其的非易失性存储器件及其制造方法
- Patent Title: Method of forming floating gate, non-volatile memory device using the same, and fabricating method thereof
- Patent Title (中): 形成浮栅的方法,使用其的非易失性存储器件及其制造方法
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Application No.: US12076878Application Date: 2008-03-25
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Publication No.: US07897458B2Publication Date: 2011-03-01
- Inventor: Jaegab Lee , Jang-Sik Lee , Chi Young Lee , Byeong Hyeok Sohn
- Applicant: Jaegab Lee , Jang-Sik Lee , Chi Young Lee , Byeong Hyeok Sohn
- Applicant Address: KR Seoul
- Assignee: Kookmin University Industry Academy Cooperation Foundation
- Current Assignee: Kookmin University Industry Academy Cooperation Foundation
- Current Assignee Address: KR Seoul
- Agency: Rosenberg, Klein & Lee
- Priority: KR10-2007-0030850 20070329
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Provided is a method of forming a floating gate, a non-volatile memory device using the same, and a method of fabricating the non-volatile memory device, in which nano-crystals of nano-size whose density and size can be easily adjusted, are synthesized using micelles so as to be used as the floating gate of the non-volatile memory device. The floating gate is fabricated by forming a tunnel oxide film on the semiconductor substrate, coating a gate formation solution on the tunnel oxide film in which the gate formation solution includes micelle templates into which precursors capable of synthesizing metallic salts in nano-structures formed by a self-assembly method are introduced, and arranging the metallic salts on the tunnel oxide film by removing the micelle templates, to thereby form the floating gate.
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