Invention Grant
US07897492B2 Apparatus and method for transformation of substrate 有权
底物转化装置及方法

Apparatus and method for transformation of substrate
Abstract:
A method is disclosed for forming a layer of a wide bandgap material in a non-wide bandgap material. The method comprises providing a substrate of a non-wide bandgap material and converting a layer of the non-wide bandgap material into a layer of a wide bandgap material. An improved component such as wide bandgap semiconductor device may be formed within the wide bandgap material through a further conversion process.
Public/Granted literature
Information query
Patent Agency Ranking
0/0