Invention Grant
US07897902B2 Imaging device and method for high-sensitivity optical scanning and integrated circuit therefor
有权
用于高灵敏度光学扫描及其集成电路的成像装置和方法
- Patent Title: Imaging device and method for high-sensitivity optical scanning and integrated circuit therefor
- Patent Title (中): 用于高灵敏度光学扫描及其集成电路的成像装置和方法
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Application No.: US12179033Application Date: 2008-07-24
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Publication No.: US07897902B2Publication Date: 2011-03-01
- Inventor: Yigal Katzir , Itay Gur-Arie , Yacov Malinovich
- Applicant: Yigal Katzir , Itay Gur-Arie , Yacov Malinovich
- Applicant Address: IL Yavne
- Assignee: Orbotech Ltd.
- Current Assignee: Orbotech Ltd.
- Current Assignee Address: IL Yavne
- Agency: Sughrue Mion, PLLC
- Main IPC: H01L27/00
- IPC: H01L27/00
Abstract:
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
Public/Granted literature
- US20080278775A1 HIGH-SENSITIVITY OPTICAL SCANNING USING MEMORY INTEGRATION Public/Granted day:2008-11-13
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