Invention Grant
- Patent Title: EUV plasma discharge lamp with conveyor belt electrodes
- Patent Title (中): EUV等离子放电灯带传送带电极
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Application No.: US12439696Application Date: 2007-08-29
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Publication No.: US07897948B2Publication Date: 2011-03-01
- Inventor: Jeroen Jonkers , Jakob Willi Neff , Ralf Pruemmer
- Applicant: Jeroen Jonkers , Jakob Willi Neff , Ralf Pruemmer
- Applicant Address: NL Eindhoven
- Assignee: Koninklijke Philips Electronics N.V.
- Current Assignee: Koninklijke Philips Electronics N.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP06120170 20060906; EP06120419 20060911
- International Application: PCT/IB2007/053480 WO 20070829
- International Announcement: WO2008/029327 WO 20080313
- Main IPC: H05G2/00
- IPC: H05G2/00

Abstract:
The present invention relates to a plasma discharge lamp for generating EUV radiation and/or soft X-rays by means of an electrically operated discharge. The proposed lamp comprises at least two electrodes arranged in a discharge space at a distance from one another to form a gap which allows the ignition of a plasma (14) in a gaseous medium between said electrodes. A metal applying device applies a metal to a surface of said electrodes. The electrodes are formed of conveyer belts (15) driven to transport the metal to said gap, wherein for each of the electrodes a shaper element (13) is provided at the gap to ensure a proper form and distance of the electrodes at the gap. An energy beam device (4) is adapted to direct an energy beam onto at least one of said surfaces in the gap evaporating said applied metal at least partially thereby producing said gaseous medium. With the proposed plasma discharge lamp high input powers can be achieved at a compact design of the lamp.
Public/Granted literature
- US20090250638A1 EUV PLASMA DISCHARGE LAMP WITH CONVEYOR BELT ELECTRODES Public/Granted day:2009-10-08
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