Invention Grant
- Patent Title: Electronic circuit
- Patent Title (中): 电子电路
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Application No.: US12476445Application Date: 2009-06-02
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Publication No.: US07897972B2Publication Date: 2011-03-01
- Inventor: Minoru Miyazaki , Akane Murakami , Baochun Cui , Mutsuo Yamamoto
- Applicant: Minoru Miyazaki , Akane Murakami , Baochun Cui , Mutsuo Yamamoto
- Applicant Address: JP Kanagawa-Ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-Ken
- Agency: Nixon Peabody LLP
- Agent Jeffrey L. Costellia
- Priority: JP4-351916 19921209; JP5-23289 19930118
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L29/10

Abstract:
An electronic circuit formed on an insulating substrate and having thin-film transistors (TFTs) comprising semiconductor layers. The thickness of the semiconductor layer is less than 1500 Å, e.g., between 100 and 750 Å. A first layer consisting mainly of titanium and nitrogen is formed on the semiconductor layer. A second layer consisting of aluminum is formed on top of the first layer. The first and second layers are patterned into conductive interconnects. The bottom surface of the second layer is substantially totally in intimate contact with the first layer. The interconnects have good contacts with the semiconductor layer.
Public/Granted literature
- US20090236607A1 ELECTRONIC CIRCUIT Public/Granted day:2009-09-24
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