Invention Grant
US07898020B2 Semiconductor memory, semiconductor memory system using the same, and method for producing quantum dots applied to semiconductor memory
有权
半导体存储器,使用其的半导体存储器系统以及应用于半导体存储器的量子点的制造方法
- Patent Title: Semiconductor memory, semiconductor memory system using the same, and method for producing quantum dots applied to semiconductor memory
- Patent Title (中): 半导体存储器,使用其的半导体存储器系统以及应用于半导体存储器的量子点的制造方法
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Application No.: US12523682Application Date: 2007-12-06
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Publication No.: US07898020B2Publication Date: 2011-03-01
- Inventor: Katsunori Makihara , Seiichi Miyazaki , Seiichiro Higashi
- Applicant: Katsunori Makihara , Seiichi Miyazaki , Seiichiro Higashi
- Applicant Address: JP Hiroshima
- Assignee: Hiroshima University
- Current Assignee: Hiroshima University
- Current Assignee Address: JP Hiroshima
- Agency: Foley & Lardner LLP
- Priority: JP2007-009772 20070119; JP2007-075803 20070323; JP2007-236635 20070912
- International Application: PCT/JP2007/001361 WO 20071206
- International Announcement: WO2008/087692 WO 20080724
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L21/3205

Abstract:
A semiconductor memory includes a composite floating structure where an insulation film is formed on a semiconductor substrate, Si-based quantum dots covered with an extremely thin Si oxide film is formed on the insulation film, silicide quantum dots covered with a high dielectric insulation film are formed on the extremely thin Si oxide film, and Si-based quantum dots covered with a high dielectric insulation film are formed on the high dielectric insulation film. Multivalued memory operations can be conducted at a high speed and with stability by applying a certain positive voltage to a gate electrode to accumulate electrons in the silicide quantum dots and by applying a certain negative voltage and weak light to the gate electrode to emit the electrons from the silicide quantum dots.
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