Invention Grant
US07898045B2 Passive electrically testable acceleration and voltage measurement devices 有权
被动电气可测加速度和电压测量装置

Passive electrically testable acceleration and voltage measurement devices
Abstract:
Acceleration and voltage measurement devices and methods of fabricating acceleration and voltage measurement devices. The acceleration and voltage measurement devices including an electrically conductive plate on a top surface of a first insulating layer; a second insulating layer on a top surface of the conductive plate, the top surface of the plate exposed in an opening in the second insulating layer; conductive nanotubes suspended across the opening, and electrically conductive contacts to the nanotubes.
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