Invention Grant
- Patent Title: Passive electrically testable acceleration and voltage measurement devices
- Patent Title (中): 被动电气可测加速度和电压测量装置
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Application No.: US12166623Application Date: 2008-07-02
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Publication No.: US07898045B2Publication Date: 2011-03-01
- Inventor: Toshiharu Furukawa , Mark Charles Hakey , Steven John Holmes , David Vaclav Horak , Charles William Koburger, III , Leah Marie Pfeifer Pastel
- Applicant: Toshiharu Furukawa , Mark Charles Hakey , Steven John Holmes , David Vaclav Horak , Charles William Koburger, III , Leah Marie Pfeifer Pastel
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent Richard M. Kotulak
- Main IPC: H01L29/84
- IPC: H01L29/84

Abstract:
Acceleration and voltage measurement devices and methods of fabricating acceleration and voltage measurement devices. The acceleration and voltage measurement devices including an electrically conductive plate on a top surface of a first insulating layer; a second insulating layer on a top surface of the conductive plate, the top surface of the plate exposed in an opening in the second insulating layer; conductive nanotubes suspended across the opening, and electrically conductive contacts to the nanotubes.
Public/Granted literature
- US20080258246A1 PASSIVE ELECTRICALLY TESTABLE ACCELERATION AND VOLTAGE MEASUREMENT DEVICES Public/Granted day:2008-10-23
Information query
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