Invention Grant
- Patent Title: MEMS sensor
- Patent Title (中): MEMS传感器
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Application No.: US12219448Application Date: 2008-07-22
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Publication No.: US07898048B2Publication Date: 2011-03-01
- Inventor: Goro Nakatani
- Applicant: Goro Nakatani
- Applicant Address: JP Kyoto
- Assignee: Rohm Co., Ltd.
- Current Assignee: Rohm Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Rabin & Berdo, PC
- Priority: JP2007-192203 20070724
- Main IPC: H01L29/84
- IPC: H01L29/84
Abstract:
An MEMS sensor is described. The MEMS sensor may include a substrate, a lower thin film provided in contact with a surface of the substrate, and an upper thin film opposed to the lower thin film at an interval on the side opposite to the substrate.
Public/Granted literature
- US20090278216A1 MEMS sensor Public/Granted day:2009-11-12
Information query
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