Invention Grant
US07898049B2 Touching microlens structure for a pixel sensor and method of fabrication
有权
用于像素传感器的触摸微透镜结构和制造方法
- Patent Title: Touching microlens structure for a pixel sensor and method of fabrication
- Patent Title (中): 用于像素传感器的触摸微透镜结构和制造方法
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Application No.: US11378020Application Date: 2006-03-17
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Publication No.: US07898049B2Publication Date: 2011-03-01
- Inventor: John E. Dillon , Timothy J. Hoague , Robert K. Leidy
- Applicant: John E. Dillon , Timothy J. Hoague , Robert K. Leidy
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser PC
- Agent Anthony J. Canale
- Main IPC: H01L31/0232
- IPC: H01L31/0232

Abstract:
A structure and method for increasing the sensitivity of pixel sensors by eliminating a gap space formed between adjacent microlens structures in a pixel sensor array. Advantageously, exposure and flowing conditions are such that adjacent microlens structures touch (are webbed) at a horizontal cross-section, yet have a round lens shape in all directions. Particularly, exposure and flowing conditions are such that each touching microlens structure is formed to have a matched uniform radius of curvature at a horizontal cross-section and at a 45 degree cross-sections. To improve quality of mircrolens structure uniformity exhibited at all pixel locations including those near a pixel array edge or corner, a top anti-reflective coating layer is applied on top of a photoresist layer prior to the exposure and flowing steps.
Public/Granted literature
- US20060261427A1 Touching microlens structure for a pixel sensor and method of fabrication Public/Granted day:2006-11-23
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