Invention Grant
- Patent Title: Planar motor and stage using the same
- Patent Title (中): 平面电机和舞台使用相同
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Application No.: US12324476Application Date: 2008-11-26
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Publication No.: US07898119B2Publication Date: 2011-03-01
- Inventor: Mitsuya Sato
- Applicant: Mitsuya Sato
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. I.P. Division
- Priority: JP2007-308968 20071129
- Main IPC: H02K41/02
- IPC: H02K41/02
Abstract:
A planar motor includes a movable body and a stator configured to drive the movable body in a plane. The stator includes a first stator unit and a second stator unit. The movable body is moved in a first direction by a force acting between the movable body and the first stator unit, and is moved in a second direction by a force acting between the movable body and the second stator unit. The first stator unit and the second stator unit are arranged to face each other in such a manner that the movable body is provided therebetween.
Public/Granted literature
- US20090140582A1 PLANAR MOTOR AND STAGE USING THE SAME Public/Granted day:2009-06-04
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