Invention Grant
US07898161B2 Diamond electron radiation cathode, electron source, electron microscope, and electron beam exposer
失效
金刚石电子辐射阴极,电子源,电子显微镜和电子束曝光机
- Patent Title: Diamond electron radiation cathode, electron source, electron microscope, and electron beam exposer
- Patent Title (中): 金刚石电子辐射阴极,电子源,电子显微镜和电子束曝光机
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Application No.: US12095430Application Date: 2007-06-27
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Publication No.: US07898161B2Publication Date: 2011-03-01
- Inventor: Yoshiyuki Yamamoto , Akihiko Ueda , Yoshiki Nishibayashi , Takahiro Imai
- Applicant: Yoshiyuki Yamamoto , Akihiko Ueda , Yoshiki Nishibayashi , Takahiro Imai
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agency: Osha Liang LLP
- Priority: JP2006-178250 20060628
- International Application: PCT/JP2007/062885 WO 20070627
- International Announcement: WO2008/001805 WO 20080103
- Main IPC: H01J1/02
- IPC: H01J1/02

Abstract:
An object is to provide an electron emitting cathode achieving high luminance, low energy dispersion, and long life. It is therefore an object to provide a diamond electron emitting cathode graspable on a sufficiently stable basis, sharpened at the tip, and improved in electric field intensity. A diamond electron emitting cathode 110 according to the present invention is partitioned into at least three regions, i.e., a front end region 203 intended for electron emission at a tip of columnar shape, a rear end region 201 intended for grasping opposite in the longitudinal direction, and a thinned intermediate region 202, a cross-sectional area of the rear end region is not less than 0.2 mm2, the tip of the front end region is sharpened, and a maximum cross-sectional area of the thinned intermediate region is not more than 0.1 mm2.
Public/Granted literature
- US20090160308A1 DIAMOND ELECTRON RADIATION CATHODE, ELECTRON SOURCE, ELECTRON MICROSCOPE, AND ELECTRON BEAM EXPOSER Public/Granted day:2009-06-25
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