Invention Grant
US07898238B2 Generating an output DC voltage with a boost converter having a controlled pulse-duty factor 有权
用具有受控脉冲占空因数的升压转换器产生输出直流电压

Generating an output DC voltage with a boost converter having a controlled pulse-duty factor
Abstract:
A method of generating an output DC voltage of a gas discharge process voltage supply unit, in which in a first voltage transformation stage a first DC voltage is transformed into a second DC voltage of a predetermined voltage range, and the output DC voltage is generated from the second DC voltage in a second voltage transformation stage. A switching element of at least one boost converter is switched with a controlled pulse-duty factor for generating the output DC voltage in the second voltage transformation stage. This method permits striking and maintenance of a plasma process.
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