Invention Grant
- Patent Title: Probe card
- Patent Title (中): 探针卡
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Application No.: US12308110Application Date: 2007-06-04
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Publication No.: US07898272B2Publication Date: 2011-03-01
- Inventor: Shunsuke Sasaki , Tsuyoshi Inuma , Yoshio Yamada , Mitsuhiro Nagaya , Takashi Akao , Hiroshi Nakayama
- Applicant: Shunsuke Sasaki , Tsuyoshi Inuma , Yoshio Yamada , Mitsuhiro Nagaya , Takashi Akao , Hiroshi Nakayama
- Applicant Address: JP Yokohama-shi
- Assignee: NHK Spring Co., Ltd.
- Current Assignee: NHK Spring Co., Ltd.
- Current Assignee Address: JP Yokohama-shi
- Agency: Edwards Angell Palmer & Dodge LLP
- Priority: JP2006-159679 20060608
- International Application: PCT/JP2007/061317 WO 20070604
- International Announcement: WO2007/142204 WO 20071213
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
A probe card includes a flat wiring board having a wiring pattern corresponding to a circuit structure for generating a signal for a test, an interposer that is stacked on the wiring board and relays wirings of the wiring board, a space transformer that is stacked on the interposer and fastened thereto by an adhesive, transforms a space between the wirings relayed by the interposer, and leads the wirings out to a surface opposite a surface facing the interposer, and a probe head that is stacked on the space transformer and houses and holds a plurality of probes.
Public/Granted literature
- US20100001748A1 Probe Card Public/Granted day:2010-01-07
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