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US07898561B2 MEMS mirror system for laser printing applications 有权
用于激光打印应用的MEMS镜系统

MEMS mirror system for laser printing applications
Abstract:
A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.
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