Invention Grant
- Patent Title: Methods and apparatus for inspecting an object
- Patent Title (中): 用于检查物体的方法和装置
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Application No.: US11256866Application Date: 2005-10-24
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Publication No.: US07898651B2Publication Date: 2011-03-01
- Inventor: Oingyang Hu , Donald Wagner Hamilton , Kevin George Harding , Joseph Benjamin Ross
- Applicant: Oingyang Hu , Donald Wagner Hamilton , Kevin George Harding , Joseph Benjamin Ross
- Applicant Address: US NY Schenectady
- Assignee: General Electric Company
- Current Assignee: General Electric Company
- Current Assignee Address: US NY Schenectady
- Agency: Armstrong Teasdale LLP
- Agent William Scott Andes, Esq.
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
A method for inspecting an object includes emitting light from at least one of a liquid crystal display (LCD) device and a liquid crystal on silicon (LCOS) device, phase-shifting light emitted from at least one of the LCD device and the LCOS device, projecting the phase-shifted light onto a surface of an object, receiving light reflected from the object surface with an imaging sensor, and analyzing the light received by the imaging sensor to facilitate inspecting at least a portion of the object.
Public/Granted literature
- US20070091320A1 Methods and apparatus for inspecting an object Public/Granted day:2007-04-26
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