Invention Grant
- Patent Title: Method and apparatus for detecting defects on a disk surface
- Patent Title (中): 用于检测盘表面上的缺陷的方法和装置
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Application No.: US12359388Application Date: 2009-01-26
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Publication No.: US07898652B2Publication Date: 2011-03-01
- Inventor: Tatsuo Hariyama , Hideaki Sasazawa , Minoru Yoshida , Shigeru Serikawa
- Applicant: Tatsuo Hariyama , Hideaki Sasazawa , Minoru Yoshida , Shigeru Serikawa
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2008-019133 20080130
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
The present invention relates to an apparatus for detecting defects on a disk surface which projects light on the disk surface by a light transmitting system, receives specula reflection light and scattered light by a light receiving system, exposes defects by performing a two-dimensional frequency filter process on a signal, and performs a defect determination process to extract a linear-shaped isolative defect candidate. Next, the present invention performs a periodicity determination process to classify and detect the periodically generated linear and circular arc defects and the isolatively generated linear and circular arc defects.
Public/Granted literature
- US20090190123A1 METHOD AND APPARATUS FOR DETECTING DEFECTS ON A DISK SURFACE Public/Granted day:2009-07-30
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