Invention Grant
- Patent Title: Equipment and method for detecting foreign matters
- Patent Title (中): 检测异物的设备和方法
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Application No.: US12504834Application Date: 2009-07-17
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Publication No.: US07898654B2Publication Date: 2011-03-01
- Inventor: Tatsuhiko Saitoh , Yuji Kobayashi , Takayuki Shimazu
- Applicant: Tatsuhiko Saitoh , Yuji Kobayashi , Takayuki Shimazu
- Applicant Address: JP Osaka-shi
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka-shi
- Agency: Venable LLP
- Agent Michael A. Sartori; Leigh D. Thelen
- Priority: JP2008-192606 20080725
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
A foreign matter detector and a foreign matter detecting method are provided, with which foreign matter detection performance can be improved. The foreign matter detector comprises: a means for irradiating first inspection light and second inspection light to an inspection area such that their incident planes are perpendicular to each other; a measuring means for measuring the spectrum of reflected light, the reflected light being a reflection of the inspection light at the inspection area; and a means for determining, by analyzing the spectrum of the reflected light, whether any foreign matter is intermingled or not.
Public/Granted literature
- US20100020314A1 EQUIPMENT AND METHOD FOR DETECTING FOREIGN MATTERS Public/Granted day:2010-01-28
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