Invention Grant
- Patent Title: Distortion measurement imaging system
- Patent Title (中): 失真测量成像系统
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Application No.: US12072385Application Date: 2008-02-26
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Publication No.: US07898670B2Publication Date: 2011-03-01
- Inventor: David Berg , Jacques Gollier , Douglas S Goodman , Correy Robert Ustanik
- Applicant: David Berg , Jacques Gollier , Douglas S Goodman , Correy Robert Ustanik
- Applicant Address: US NY Corning
- Assignee: Corning Incorporated
- Current Assignee: Corning Incorporated
- Current Assignee Address: US NY Corning
- Agent Thomas R. Beall
- Main IPC: G01B9/02
- IPC: G01B9/02
Abstract:
A distortion measurement and inspection system is presented. In one embodiment, a vision system is implemented. The vision system performs dual focal plane imaging where simultaneous imaging of two focal planes is simultaneously performed on a sample substrate and a reference substrate to determine distortion. In addition, a highly reflective background is implemented to provide for more resolution during distortion measurement.
Public/Granted literature
- US20080204740A1 Distortion measurement imaging system Public/Granted day:2008-08-28
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