Invention Grant
US07898671B2 Interferometer having a mirror system for measuring a measured object 失效
干涉仪具有用于测量被测物体的反射镜系统

  • Patent Title: Interferometer having a mirror system for measuring a measured object
  • Patent Title (中): 干涉仪具有用于测量被测物体的反射镜系统
  • Application No.: US11662389
    Application Date: 2005-07-22
  • Publication No.: US07898671B2
    Publication Date: 2011-03-01
  • Inventor: Jochen Strahle
  • Applicant: Jochen Strahle
  • Applicant Address: DE Stuttgart
  • Assignee: Robert Bosch GmbH
  • Current Assignee: Robert Bosch GmbH
  • Current Assignee Address: DE Stuttgart
  • Agency: Kenyon & Kenyon LLP
  • Priority: DE102004045806 20040922
  • International Application: PCT/EP2005/053573 WO 20050722
  • International Announcement: WO2006/032560 WO 20060330
  • Main IPC: G01B11/02
  • IPC: G01B11/02
Interferometer having a mirror system for measuring a measured object
Abstract:
An interferometric measuring device for measuring a measured object, in particular for thickness measurement of the measured object. A special-purpose objective having a mirror system is provided, which includes at least one first deflection mirror and one second deflection mirror and in which these are situated in such a way that the object beams incident on the first deflection mirror or on the second deflection mirror are directed respectively onto a first side or a second side, which is parallel thereto, of the measured object to be measured in a first beam path or a second beam path, respectively, which are antiparallel to one another. The mirror system additionally has at least one first position mirror for imaging the position of the measured object to be measured in relation to the first deflection mirror and/or the second deflection mirror.
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