Invention Grant
US07899308B2 Evaporation device with receptacle for receiving material to be evaporated
失效
具有用于接收待蒸发物质的容器的蒸发装置
- Patent Title: Evaporation device with receptacle for receiving material to be evaporated
- Patent Title (中): 具有用于接收待蒸发物质的容器的蒸发装置
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Application No.: US11445941Application Date: 2006-06-02
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Publication No.: US07899308B2Publication Date: 2011-03-01
- Inventor: Karl-Heinrich Wenk
- Applicant: Karl-Heinrich Wenk
- Applicant Address: DE Alzenau
- Assignee: Applied Materials GmbH & Co. KG
- Current Assignee: Applied Materials GmbH & Co. KG
- Current Assignee Address: DE Alzenau
- Agency: Fulbright & Jaworski L.L.P.
- Priority: EP05023355 20051026
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C16/00
Abstract:
The invention relates to an evaporator device with a receptacle for holding material to be evaporated. With this evaporator device an oil film can be applied onto specific sites of a sheet to be coated, this sheet being coated with aluminum or zinc in a further step. At the sites at which the oil film is located, no aluminum or zinc is deposited. With the aid of a rod valve, precise application of the oil onto the sheet is ensured. This rod valve is driven by a stepping motor, which can release percentage fractions of oil vapor.
Public/Granted literature
- US20070092233A1 Evaporation device with receptacle for receiving material to be evaporated Public/Granted day:2007-04-26
Information query
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