Invention Grant
US07899557B2 Input signal analyzing system and control apparatus using same
有权
输入信号分析系统及使用该控制装置的控制装置
- Patent Title: Input signal analyzing system and control apparatus using same
- Patent Title (中): 输入信号分析系统及使用该控制装置的控制装置
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Application No.: US11069599Application Date: 2005-03-01
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Publication No.: US07899557B2Publication Date: 2011-03-01
- Inventor: Masahiro Takizawa , Kazuyoshi Ishigaya , Kunio Ootani
- Applicant: Masahiro Takizawa , Kazuyoshi Ishigaya , Kunio Ootani
- Applicant Address: JP Tokyo
- Assignee: ASM Japan K.K.
- Current Assignee: ASM Japan K.K.
- Current Assignee Address: JP Tokyo
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: G06F19/00
- IPC: G06F19/00
Abstract:
For example, by providing MMF software 10, 11 transferring data using a memory-mapped file respectively in a semiconductor manufacturing apparatus 1 and in an input signal analyzing system 8, data transfer load placed on control software 4 and analyzing software 9 is reduced. Additionally, in the MMF software 10, by inserting counter information in the memory-mapped file and by observing the information by the MMF software 11, communication abnormality is detected.
Public/Granted literature
- US20060218312A1 Input signal analyzing system and control apparatus using same Public/Granted day:2006-09-28
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