Invention Grant
- Patent Title: Automatic dynamic baseline creation and adjustment
- Patent Title (中): 自动动态基线创建和调整
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Application No.: US11536577Application Date: 2006-09-28
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Publication No.: US07899627B2Publication Date: 2011-03-01
- Inventor: Chung-Ho Huang , Jackie Seto , Nicolas Bright
- Applicant: Chung-Ho Huang , Jackie Seto , Nicolas Bright
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: IPSG, P.C.
- Main IPC: G06F19/00
- IPC: G06F19/00 ; H01L21/00

Abstract:
In a plasma processing system, a method for dynamically establishing a baseline is provided. The method includes processing a first substrate. The method also includes collecting a first signal data for the first substrate. The method further includes comparing the first signal data against the baseline. The method moreover includes including the first signal data in a recalculation of the baseline if the first signal data is within a confidence level range, which is in between a top level above the baseline and a bottom level below the baseline.
Public/Granted literature
- US20080079918A1 AUTOMATIC DYNAMIC BASELINE CREATION AND ADJUSTMENT Public/Granted day:2008-04-03
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