Invention Grant
US07900342B2 Methods of fabricating magnetoresistance sensors pinned by an etch induced magnetic anisotropy 有权
制造由蚀刻诱导的磁各向异性固定的磁阻传感器的方法

Methods of fabricating magnetoresistance sensors pinned by an etch induced magnetic anisotropy
Abstract:
Magnetoresistance sensors with magnetic pinned layers that are pinned by anisotropic etch induced magnetic anisotropies and methods for fabricating the magnetoresistance sensors are provided. The method comprises forming a seed layer structure. The seed layer is etched to form an anisotropic etch along a top surface of the seed layer. A magnetic pinned layer is formed on the top surface of the seed layer structure. The anisotropic etch on the top surface of the seed layer structure induces a magnetic anisotropy in the magnetic pinned layer, which pins the magnetization of the magnetic pinned layer structure.
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