Invention Grant
- Patent Title: Multi-dimensional standing wave probe for microscale and nanoscale measurement, manipulation, and surface modification
- Patent Title (中): 用于微尺度和纳米尺度测量,操作和表面改性的多维驻波探头
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Application No.: US11956915Application Date: 2007-12-14
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Publication No.: US07900506B2Publication Date: 2011-03-08
- Inventor: Shane C. Woody , Marcin B. Bauza , Stuart T. Smith
- Applicant: Shane C. Woody , Marcin B. Bauza , Stuart T. Smith
- Applicant Address: US NC Charlotte
- Assignee: Insitutec, Inc.
- Current Assignee: Insitutec, Inc.
- Current Assignee Address: US NC Charlotte
- Agency: Clements Bernard PLLC
- Agent Christopher L. Bernard; Lawrence A. Baratta Jr.
- Main IPC: G01B5/28
- IPC: G01B5/28 ; G01Q20/00 ; G01Q60/38

Abstract:
The present invention provides a multi-dimensional standing wave probe for microscale and nanoscale measurement, manipulation, and surface modification, including: a filament having a first free end and a second end that is attached to at least one actuator to apply oscillation cycles to the filament; wherein the oscillation of the filament during at least one complete cycle of oscillation of the actuator causes the free end to move in a multi-dimensional envelope, producing a defined virtual probe tip at the free end, wherein a shape of the virtual probe tip is defined by both a characteristic shape of the oscillation of the free end and a geometry of the filament. Optionally, the actuator includes a monolithic crystal actuator. Preferably, the monolithic crystal actuator includes a crystal having zero grain boundaries. The monolithic crystal actuator also includes a plurality of thin flexure structures. The monolithic crystal actuator further includes a plurality of metallic electrodes disposed on inside or outside surfaces, or a combination thereof, of the plurality of thin flexure structures.
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