Invention Grant
US07900514B2 Tuning-fork-type bimorph piezoelectric vibrator and vibrating gyroscope module including the vibrator 有权
调音叉型双压电振动器和包括振动器的振动陀螺仪模块

Tuning-fork-type bimorph piezoelectric vibrator and vibrating gyroscope module including the vibrator
Abstract:
A tuning-fork-type bimorph piezoelectric vibrator includes two piezoelectric bodies that are bonded together and have opposite polarization directions. An intermediate metal layer is disposed between bonding surfaces of the piezoelectric bodies. A first slit is arranged to define legs and a base of the tuning fork structure. Second slits are provided in a first principal surface having a front metal layer to define driving/detecting electrodes. The tuning-fork-type bimorph piezoelectric vibrator provides improved temperature characteristics of a detuning frequency by not including a back metal layer on a second principal surface at least in an area in which greater than a predetermined level of stress is applied during operation.
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