Invention Grant
- Patent Title: Pressure sensor device
- Patent Title (中): 压力传感器装置
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Application No.: US12487347Application Date: 2009-06-18
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Publication No.: US07900520B2Publication Date: 2011-03-08
- Inventor: Paolo Colombo
- Applicant: Paolo Colombo
- Applicant Address: IT Casale Monferrato (Alessandria)
- Assignee: Eltek S.p.A.
- Current Assignee: Eltek S.p.A.
- Current Assignee Address: IT Casale Monferrato (Alessandria)
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Victor A. Cardona, Esq.
- Priority: ITTO2008A0485 20080619; EP09162876 20090616
- Main IPC: G01L9/00
- IPC: G01L9/00 ; H01L21/02

Abstract:
A semiconductor pressure sensor for a pressure sensor device has a pressure detection element which includes a membrane made of semiconductor material, particularly silicon. The sensor includes a support having a three-dimensional body passed through by a detection passage. The detection element is made integral with a first end face of the three-dimensional body, substantially at a respective end of the detection passage. The support is configured to serve the function of a mechanical and/or hydraulic adaptor or interface, with the aim of mounting the sensor into a pressure sensor device, particularly to allow mounting the pressure sensor into a pressure sensor device configured for mounting a sensor of the type referred to as monolithic or ceramic.
Public/Granted literature
- US20090314096A1 PRESSURE SENSOR DEVICE Public/Granted day:2009-12-24
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