Invention Grant
- Patent Title: Defect classification utilizing data from a non-vibrating contact potential difference sensor
- Patent Title (中): 利用非振动接触电位差传感器的数据进行缺陷分类
-
Application No.: US11948518Application Date: 2007-11-30
-
Publication No.: US07900526B2Publication Date: 2011-03-08
- Inventor: Jeffrey Alan Hawthorne , M. Brandon Steele , Yeyuan Yang , Mark Schulze
- Applicant: Jeffrey Alan Hawthorne , M. Brandon Steele , Yeyuan Yang , Mark Schulze
- Applicant Address: US GA Atlanta
- Assignee: QCEPT Technologies, Inc.
- Current Assignee: QCEPT Technologies, Inc.
- Current Assignee Address: US GA Atlanta
- Agency: Foley & Lardner LLP
- Main IPC: G01N33/00
- IPC: G01N33/00
Abstract:
A method and system for identifying and classifying non-uniformities on the surface of a semiconductor or in a semiconductor. The method and system involves scanning the wafer surface with a non-vibrating contact potential difference sensor to detect the locations of non-uniformities, extracting features characteristic of the non-uniformities, and applying a set of rules to these features to classify the type of each non-uniformity.
Public/Granted literature
- US20090139312A1 DEFECT CLASSIFICATION UTILIZING DATA FROM A NON-VIBRATING CONTACT POTENTIAL DIFFERENCE SENSOR Public/Granted day:2009-06-04
Information query
