Invention Grant
- Patent Title: Apparatus for supplying chemical liquid
- Patent Title (中): 用于提供化学液体的设备
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Application No.: US12248085Application Date: 2008-10-09
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Publication No.: US07900853B2Publication Date: 2011-03-08
- Inventor: Si-Eun Kim , Kyo-Woog Koo , Keun-Young Park
- Applicant: Si-Eun Kim , Kyo-Woog Koo , Keun-Young Park
- Applicant Address: KR
- Assignee: Semes Co., Ltd.
- Current Assignee: Semes Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2007-0102692 20071011
- Main IPC: B05B1/28
- IPC: B05B1/28
Abstract:
Provided is an apparatus for supplying chemical liquid. The apparatus includes: a plurality of nozzles, each of which can be moved forward or backward and supplies chemical liquid; a nozzle cover which accommodates the nozzles therein and has an open end to allow each of the nozzles to move into or out of the nozzle cover; and a nozzle driver which moves each of the nozzles forward or backward.
Public/Granted literature
- US20090120468A1 APPARATUS FOR SUPPLYING CHEMICAL LIQUID Public/Granted day:2009-05-14
Information query
IPC分类:
