Invention Grant
- Patent Title: Specimen stage
- Patent Title (中): 标本阶段
-
Application No.: US12393037Application Date: 2009-02-26
-
Publication No.: US07900896B2Publication Date: 2011-03-08
- Inventor: Masashi Fujita
- Applicant: Masashi Fujita
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2008-047031 20080228
- Main IPC: B23Q1/25
- IPC: B23Q1/25 ; B23Q1/62

Abstract:
An object of the present invention is to provide a specimen stage which is simple in structure, and which suppresses a positional shift due to a friction heat caused by a brake or the like. One aspect to achieve the object provides a specimen stage including: a thrust portion thrust by a thrusting member; and a slide surface thrust by the thrust portion. When the specimen stage stops, the specimen stage performs a control in a way that a part of the slide surface in contact with the thrust portion, and/or a portion adjacent to the part or the thrust portion is heated. By heating the part of the slide surface or the like in this manner, a temperature gradient can be suppressed as described above (see FIG. 3).
Public/Granted literature
- US20090218510A1 SPECIMEN STAGE Public/Granted day:2009-09-03
Information query