Invention Grant
US07901509B2 Heating apparatus with enhanced thermal uniformity and method for making thereof
有权
具有增强的热均匀性的加热装置及其制造方法
- Patent Title: Heating apparatus with enhanced thermal uniformity and method for making thereof
- Patent Title (中): 具有增强的热均匀性的加热装置及其制造方法
-
Application No.: US11549968Application Date: 2006-10-16
-
Publication No.: US07901509B2Publication Date: 2011-03-08
- Inventor: John Mariner , Ajit Sane , Toshiki Ebata , Marc Schaepkens , Xiang Liu , Wei Fan
- Applicant: John Mariner , Ajit Sane , Toshiki Ebata , Marc Schaepkens , Xiang Liu , Wei Fan
- Applicant Address: US NY Albany
- Assignee: Momentive Performance Materials Inc.
- Current Assignee: Momentive Performance Materials Inc.
- Current Assignee Address: US NY Albany
- Agent Joseph E. Waters
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/306
Abstract:
A heating apparatus for regulating/controlling the surface temperature of a substrate is provided. At least a thermal pyrolytic graphite (TPG) layer is embedded in the heater to diffuse the temperature difference of the various components in the heating apparatus and provide temporal and spatial control of the surface temperature of the substrate, for a relatively uniform substrate temperature with the difference between the maximum and minimum temperature points on the substrate of less than 10° C.
Public/Granted literature
- US20080066676A1 Heating apparatus with enhanced thermal uniformity and method for making thereof Public/Granted day:2008-03-20
Information query
IPC分类:
