Invention Grant
- Patent Title: Use of soft adhesive to attach pellicle to reticle
- Patent Title (中): 使用柔软的粘合剂将防护薄膜组件附着到掩模版上
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Application No.: US12316086Application Date: 2008-12-08
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Publication No.: US07901847B2Publication Date: 2011-03-08
- Inventor: David Mushell , Henry Yun
- Applicant: David Mushell , Henry Yun
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Winkle, PLLC
- Main IPC: G03F1/00
- IPC: G03F1/00
Abstract:
A pellicle is attached to a reticle by a soft adhesive. The distortion of the reticle is less than if a hard adhesive were used.
Public/Granted literature
- US20100143829A1 Use of soft adhesive to attach pellicle to reticle Public/Granted day:2010-06-10
Information query
